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About this Engineering article
Effect of Ar+, N2+, He+ and H2+ bombardment on the composition and structure of CNx layers by I Bertóti; M Mohai; A Tóth; B Zelei is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- I Bertóti; M Mohai; A Tóth; B Zelei
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0168-583X)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)