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Diaphragm Geometry in MEMS Sensors by Hrushi Kesan is a document available to read on EtoBox.
What is Diaphragm Geometry in MEMS Sensors about?
The document studies the effect of geometry on the sensitivity of MEMS parallel plate capacitive pressure sensors. It analyzes circular, square, and rectangular diaphragm shapes. The circular diaphragm provides the best sensitivity due to its symmetrical shape and ability to achieve large deflections. Sensitivity increases with deflection, which is greatest for the circular diaphragm. The square diaphragm induces more stress but the circular design is most suitable for biomedical applications and pressure s
- Author
- Hrushi Kesan
- Language
- EN