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About this Engineering article
Fabrication and evaluation of 3D-electric micro filters using proton beam writing by Yusuke Furuta; Hiroyuki Nishikawa; Takahiro Satoh; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Yusuke Furuta; Hiroyuki Nishikawa; Takahiro Satoh; Yasuyuki Ishii; Tomihiro Kamiya; Ryota Nakao; Satoshi Uchida
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)