About this scholarly article

1987 International Electron Devices Meeting - A practical trench isolation technology with a novel planarization process by Fuse, G.; Ogawa, H.; Tateiwa, K.; Nakao, I.; Odanaka, S.; Fukumoto, M.; Iwasaki, H.; Ohzone, T. is a scholarly article available to read on EtoBox.

Author

Fuse, G.; Ogawa, H.; Tateiwa, K.; Nakao, I.; Odanaka, S.; Fukumoto, M.; Iwasaki, H.; Ohzone, T.

Publisher

IRE

Published

1987