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About this Engineering article
Metal-free and Gasless Space Charge Compensation of Low Energy Ion Beam by Using Surface-carbonized Silicon Field Emitter Array by Takeuchi, Mitsuaki; Gotoh, Yasuhito; Tsuji, Hiroshi; Ishikawa, Junzo; Sakai, Shigeki is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Takeuchi, Mitsuaki; Gotoh, Yasuhito; Tsuji, Hiroshi; Ishikawa, Junzo; Sakai, Shigeki
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics; AVS Science and Technology Society (ISSN 1520-8567)
- Published
- 2010
- Field
- Engineering (Physical Sciences)