About this scholarly article

2009 IEEE Nanotechnology Materials and Devices Conference - Development of plasma integrated AFM nano manufacturing workcell by King Wai Chiu Lai, ; Xi, Ning; Jiangbo Zhang, ; Narendra, Jeffri; Grotjohn, Timothy; Asmussen, Jes is a scholarly article available to read on EtoBox.

Author

King Wai Chiu Lai, ; Xi, Ning; Jiangbo Zhang, ; Narendra, Jeffri; Grotjohn, Timothy; Asmussen, Jes

Publisher

IEEE

Published

2009

Language

EN