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About this Engineering article
7181. Characterization of sputter-deposited ZrBxOy films: J Ebisawa et al, J Vac Sci Technol, A8, 1990, 1335–1339 is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1991
- Language
- EN
- Field
- Engineering (Physical Sciences)