About this scholarly article

2010 IEEE 16th International Mixed-Signals, Sensors and Systems Test Workshop (IMS3TW) - Modeling the influence of etching defects on the sensitivity of MEMS convective accelerometers by Rekik, A.A.; Azais, F.; Dumas, N.; Mailly, F.; Nouet, P. is a scholarly article available to read on EtoBox.

Author

Rekik, A.A.; Azais, F.; Dumas, N.; Mailly, F.; Nouet, P.

Publisher

IEEE

Published

2010