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Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming by Seitaro Kumamoto; Souichiro Fukuyama; Seiya Nagano; Keiichiro Yasuda; Yusuke Kitamura; Masaaki Iwatsuki; Hideo Baba; Toshihiro Ihara; Yoshitaka Nakanishi; Yuta Nakashima is a Engineering article available to read on EtoBox.
What is Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming about?
It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to three-dimensional shapes by combining patterning using photolithography with electroforming technology. First, a resist structure was formed on a Cu substrate. Then, using a Ni sulfamate electroforming bath, a Ni structure was formed by electroforming the fabricated resist structure. Finally, the resist structure was removed to release the Ni structure fabricated on the substrate, and electroforming was used to Au-plate the entire surface. Scanning-electron microscopy revealed that the structure presented a high aspect ratio (thickness/resist width = 3.5), and metal structures could be fabricated without defects across the entire surface, including a high aspect ratio. The metallic structures had an average film thickness of 12.9 μm with σ = 0.49 μm, hardness of 600 HV, and slit width of 7.9 μm with σ = 0.25 μm. This microfabrication enables the fabrication of metal structures that defo
Who reads Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Seitaro Kumamoto; Souichiro Fukuyama; Seiya Nagano; Keiichiro Yasuda; Yusuke Kitamura; Masaaki Iwatsuki; Hideo Baba; Toshihiro Ihara; Yoshitaka Nakanishi; Yuta Nakashima
- Published
- 2022
- Language
- EN
- Field
- Engineering (Physical Sciences)