About this Engineering article
The Control of the High-density Microwave Plasma for Large-area Electronics by Hajime Shirai; Yoshikazu Sakuma; Hiroyuki Ueyama is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Hajime Shirai; Yoshikazu Sakuma; Hiroyuki Ueyama
- Publisher
- Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)