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About this Engineering article
Methodology and fabrication of adherent and crack-free SU-8 photoresist-derived carbon MEMS on fused silica transparent substrates by Pilloni, Oscar; Madou, Marc J; Mendoza, Doroteo; Muhl, Stephen; Oropeza-Ramos, Laura is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Pilloni, Oscar; Madou, Marc J; Mendoza, Doroteo; Muhl, Stephen; Oropeza-Ramos, Laura
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 2019
- Field
- Engineering (Physical Sciences)