About this scholarly article

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 12 February 2012)] Design for Manufacturability through Design-Process Integration VI - Advanced techniques for design assembly and characterization for the 14nm node with LFD using a black box API by Opitz, Juliann; Torres, Andres; Graur, Ioana; Manhawy, Wael; Kanodia, Suniti; Shafee, Marwah; Mohamed, Sarah; Hassand, Ahmed; Bickford, Jeanne; Mason, Mark E. is a scholarly article available to read on EtoBox.

Author

Opitz, Juliann; Torres, Andres; Graur, Ioana; Manhawy, Wael; Kanodia, Suniti; Shafee, Marwah; Mohamed, Sarah; Hassand, Ahmed; Bickford, Jeanne; Mason, Mark E.

Publisher

SPIE

Published

2012

Language

EN