About this scholarly article

SPIE Proceedings [SPIE International Symposium on Optomechatronic Technologies - Lausanne, Switzerland (Monday 8 October 2007)] Optomechatronic Systems Control III - CameraMan: nanohandling robot cell inside a scanning electron microscope with flexible vision feedback by Fatikow, Sergej; Jasper, Daniel; Fatikow, Sergej; Janabi-Sharifi, Farrokh; Fukuda, Toshio; Cho, Hyungsuck; Koivo, Heikki N. is a scholarly article available to read on EtoBox.

Author

Fatikow, Sergej; Jasper, Daniel; Fatikow, Sergej; Janabi-Sharifi, Farrokh; Fukuda, Toshio; Cho, Hyungsuck; Koivo, Heikki N.

Publisher

SPIE

Published

2007