Can I read A Novel Green Chemical Mechanical Polishing for Potassium Dihydrogen Phosphate Using Corn Oil Slurry on EtoBox?

A Novel Green Chemical Mechanical Polishing for Potassium Dihydrogen Phosphate Using Corn Oil Slurry by X. Cui; Z. Zhang; C. Shi; F. Meng; G. Xu; W. Xie; Z. Liu; J. Wang; W. Wen is a Materials Science article available to read on EtoBox.

What is A Novel Green Chemical Mechanical Polishing for Potassium Dihydrogen Phosphate Using Corn Oil Slurry about?

Potassium dihydrogen phosphate (KH 2 PO 4 , KDP) offers a promising potential for high-power laser and nuclear fusion systems. However, it is a great challenge to controllably process KDP crystal that is one of the most difficult-to-process materials due to its soft-brittle, deliquescence, and temperature sensitivity. In this work, novel green chemical mechanical polishing slurry was developed by utilizing corn oil, CeO 2 , Na 2 CO 3 solution, and polysorbate. After CMP, the surface roughness Sa of KDP is achieved to 0.648 nm with a large scanning area of 10,000 mm 2 . To the best of our knowledge, this is the lowest surface roughness of KDP reported so far for such a large measurement area. During CMP, the encased small amount of Na 2 CO 3 solution in corn oil can be released under mechanical stress, which causes the bulges of KDP surface to form deliquescent soft layer and occur a bit of dissociation. Meanwhile, the reaction of CO 3 2À and dissociated H 2 PO 4 À can produce CO 2 gas, playing the role in protecting the concave area on the surface from being dissolved. These findings provide a promising avenue for the development of highperformance surfaces with the nature of soft-

Who reads A Novel Green Chemical Mechanical Polishing for Potassium Dihydrogen Phosphate Using Corn Oil Slurry?

Author

X. Cui; Z. Zhang; C. Shi; F. Meng; G. Xu; W. Xie; Z. Liu; J. Wang; W. Wen

Publisher

Elsevier BV

Published

2022

Language

EN

Field

Materials Science (Physical Sciences)