Opening book details…
About this Engineering article
A Microtranslation Table with Scratch-drive Actuators Fabricated from Silicon-on-insulator Wafer by Y. Kanamori; H. Yahagi; K. Hane is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Y. Kanamori; H. Yahagi; K. Hane
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)