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About this Engineering article
Reliability Evaluation of Al 2 O 3 Deposited by Ozone-Based Atomic Layer Deposition on Dry-Etched n-Type GaN by Kikuta, Daigo; Narita, Tetsuo; Kutsuki, Katsuhiro; Uesugi, Tsutomu; Kachi, Tetsu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kikuta, Daigo; Narita, Tetsuo; Kutsuki, Katsuhiro; Uesugi, Tsutomu; Kachi, Tetsu
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2013
- Language
- EN
- Field
- Engineering (Physical Sciences)
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