About this scholarly article

SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 23 June 2003)] Microsystems Engineering: Metrology and Inspection III - Nanoscale displacement measurement of MEMS devices using fiber optic interferometry by Lee, Chee Wei; Zhang, Xuming; Tjin, Swee Chuan; Liu, Ai Qun; Gorecki, Christophe is a scholarly article available to read on EtoBox.

Author

Lee, Chee Wei; Zhang, Xuming; Tjin, Swee Chuan; Liu, Ai Qun; Gorecki, Christophe

Publisher

SPIE

Published

2003

Language

EN