About this scholarly article

2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Piezoelectric Microcantilevers with Two PZT Thin-Film Elements for Microsensors and Microactuators by Liu, Mengwei; Cui, Tianhong; Dong, Weijie; Cui, Yan; Wang, Jing; Du, Liqun; Wang, Liding is a scholarly article available to read on EtoBox.

Author

Liu, Mengwei; Cui, Tianhong; Dong, Weijie; Cui, Yan; Wang, Jing; Du, Liqun; Wang, Liding

Publisher

IEEE

Published

2006