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About this Engineering article
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF by Liu, Junbo; Zhou, Shaolin; Hu, Song; Gao, Hongtao; He, Yu; Cheng, Yiguang is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Liu, Junbo; Zhou, Shaolin; Hu, Song; Gao, Hongtao; He, Yu; Cheng, Yiguang
- Publisher
- IEEE; Institute of Electrical and Electronics Engineers; Institute of Electrical and Electronics Engineers (IEEE) (ISSN 1041-1135)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)
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