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Removal of impurities from stagnant regions in process vessels and flow components is a major bottleneck of purge operations and typically associated with large downtimes and UHP gas consumption. A comprehensive mathematical model is developed for study of the purge process in chambers with complex geometry and stagnant regions inaccessible to gas flow. The model takes into account the dynamics of removing impurities in the gas phase as well as those adsorbed on the chamber surfaces. Using this model, t

Author

polaris44

Language

EN