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About this scholarly article
SPIE Proceedings [SPIE Microlithography 2005 - San Jose, CA (Sunday 27 February 2005)] Optical Microlithography XVIII - Hardness, elastic modulus, and fracture toughness bulk properties in Corning calcium fluoride by Ladison, Julie L.; Price, James J.; Helfinstine, John D.; Rosch, William R.; Smith, Bruce W. is a scholarly article available to read on EtoBox.
- Author
- Ladison, Julie L.; Price, James J.; Helfinstine, John D.; Rosch, William R.; Smith, Bruce W.
- Publisher
- SPIE
- Published
- 2005