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Critical tensile strain and water vapor transmission rate for nanolaminate films grown using Al2O3 atomic layer deposition and alucone molecular layer deposition by Jen, Shih-Hui; Lee, Byoung H.; George, Steven M.; McLean, Robert S.; Carcia, Peter F. is a Engineering article available to read on EtoBox.

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Author
Jen, Shih-Hui; Lee, Byoung H.; George, Steven M.; McLean, Robert S.; Carcia, Peter F.
Publisher
American Institute of Physics; AIP Publishing (ISSN 0003-6951)
Published
2012
Field
Engineering (Physical Sciences)

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