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About this Engineering article

Structure analysis, mechanical property, and biocompatibility of TaOxNy thin films by Hsieh, J.H.; Lai, Y.H.; Lin, Y.C.; Liao, S.J.; Li, C.; Chang, Y.H.; Hu, C.C. is a Engineering article available to read on EtoBox.

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Author
Hsieh, J.H.; Lai, Y.H.; Lin, Y.C.; Liao, S.J.; Li, C.; Chang, Y.H.; Hu, C.C.
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)
Published
2016
Field
Engineering (Physical Sciences)

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