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About this Engineering article
Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption by Lara-Castro, Miguel; Herrera-Amaya, Adrian; Escarola-Rosas, Marco; Vázquez-Toledo, Moisés; López-Huerta, Francisco; Aguilera-Cortés, Luz; Herrera-May, Agustín is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Lara-Castro, Miguel; Herrera-Amaya, Adrian; Escarola-Rosas, Marco; Vázquez-Toledo, Moisés; López-Huerta, Francisco; Aguilera-Cortés, Luz; Herrera-May, Agustín
- Publisher
- MDPI AG; Multidisciplinary Digital Publishing Institute (MDPI); Basel: Multidisciplinary Digital Publishing Institute (MDPI), 2010- (ISSN 2072-666X)
- Published
- 2017
- Field
- Engineering (Physical Sciences)