About this scholarly article

Proceedings of 35th European Solid-State Device Research Conference, 2005. ESSDERC 2005. - Work function control of metal gates by interdiffused Ni-Ta with high thermal stability by Matsukawa, T.; Liu, Y.X.; Masahara, M.; Endo, K.; Ishii, K.; Yamauchi, H.; Sugimata, E.; Takashima, H.; Kanemaru, S.; Suzuki, E. is a scholarly article available to read on EtoBox.

Author

Matsukawa, T.; Liu, Y.X.; Masahara, M.; Endo, K.; Ishii, K.; Yamauchi, H.; Sugimata, E.; Takashima, H.; Kanemaru, S.; Suzuki, E.

Publisher

IEEE

Published

2005