About this scholarly article

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference - Three-dimensional femtosecond photochemical etching in silicon by Yujun Deng, ; Huimin Ouyang, ; Fauchet, Philippe M.; Knox, Wayne H. is a scholarly article available to read on EtoBox.

Author

Yujun Deng, ; Huimin Ouyang, ; Fauchet, Philippe M.; Knox, Wayne H.

Publisher

IEEE

Published

2006

Language

EN