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The Effect of Ar/H2 Plasma Pretreatments on Porous K=2.0 Dielectrics for Pore Sealing by Self-Assembled Monolayers Deposition by Sun, Y.; Swerts, J.; Verdonck, P.; Maheshwari, A.; Prado, J.L.; de Feyter, S.; Armini, S. is a Engineering article available to read on EtoBox.
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- Author
- Sun, Y.; Swerts, J.; Verdonck, P.; Maheshwari, A.; Prado, J.L.; de Feyter, S.; Armini, S.
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 2012
- Field
- Engineering (Physical Sciences)