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Wafer-Level Packaging for MEMS Devices by 18353093837 is a document available to read on EtoBox.
What is Wafer-Level Packaging for MEMS Devices about?
This paper presents a wafer-level package for MEMS devices that integrates simultaneous through silicon via (TSV) connection and cavity hermetic sealing using low-temperature solder bonding. The proposed structure utilizes a
- Author
- 18353093837
- Language
- EN