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About this Engineering article
Structural and Mechanical Properties of Diamond-like Carbon Films Deposited by Direct Current Magnetron Sputtering by Broitman, E.; Hellgren, N.; Czigány, Zs.; Twesten, R. D.; Luning, J.; Petrov, I.; Hultman, L.; Holloway, B. C is a Engineering article available to read on EtoBox.
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- Author
- Broitman, E.; Hellgren, N.; Czigány, Zs.; Twesten, R. D.; Luning, J.; Petrov, I.; Hultman, L.; Holloway, B. C
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2003
- Language
- EN
- Field
- Engineering (Physical Sciences)