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About this Engineering article
Formation of Ta/Ti/Al/Mo/Au ohmic contacts to an AlGaN/AlN/GaN heterostructure grown on a silicon substrate by Osipov, K. Yu.; Velikovskiy, L. E.; Kagadei, V. A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Osipov, K. Yu.; Velikovskiy, L. E.; Kagadei, V. A.
- Publisher
- Springer; Pleiades Publishing; Pleiades Publishing Ltd (ISSN 1063-7826)
- Published
- 2014
- Language
- EN
- Field
- Engineering (Physical Sciences)
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