About this scholarly article

2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Metrology of deep trench structures with polarized FTIR reflectance spectrum by Zhang, Chuanwei; Liu, Shiyuan; Shi, Tielin is a scholarly article available to read on EtoBox.

Author

Zhang, Chuanwei; Liu, Shiyuan; Shi, Tielin

Publisher

IEEE

Published

2009

Language

EN