Can I read Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) on EtoBox?

Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) by Markku Tilli; Mervi Paulasto-Kröckel; Teruaki Motooka; Veikko Lindroos; Veli-Matti Airaksinen; Sami Franssila; Ari Lehto is a book available to read on EtoBox.

What is Handbook of Silicon Based MEMS Materials and Technologies (Micro and Nano Technologies) about?

A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R & D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at t

Author

Markku Tilli; Mervi Paulasto-Kröckel; Teruaki Motooka; Veikko Lindroos; Veli-Matti Airaksinen; Sami Franssila; Ari Lehto

Publisher

William Andrew; Elsevier Science [distributor]; William Andrew/Elsevier

Published

2010

Language

EN

ISBN

9781282541146

Subjects

Engineering, Science, Technology

Updated

2026-03-24