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About this Engineering article
Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review by Mahammadrafeeq Manvi; K.B. Mruthyunjaya Swamy is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Mahammadrafeeq Manvi; K.B. Mruthyunjaya Swamy
- Publisher
- Elsevier BV
- Published
- 2022
- Language
- EN
- Field
- Engineering (Physical Sciences)