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ChemInform Abstract: Masking Considerations in Chemically Assisted Ion Beam Etching of GaAs/AlGaAs Laser Structures. by BEHFAR-RAD, A.; WONG, S. S.; DAVIS, R. J.; WOLF, E. D. is a Chemistry article available to read on EtoBox.

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Author
BEHFAR-RAD, A.; WONG, S. S.; DAVIS, R. J.; WOLF, E. D.
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); Wiley (ISSN 0931-7597)
Published
1989
Field
Chemistry (Physical Sciences)

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