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A new approach in non-destructive characterization and XY profilometry of coatings by J. Cazaux; O. Jbara; X. Thomas is a Engineering article available to read on EtoBox.
What is A new approach in non-destructive characterization and XY profilometry of coatings about?
## Abstract A scanning electron microscope equipped with an x‐ray detector has been used to characterize the thickness and elemental composition of coating on substrates. The proportionality between the x‐ray signal intensity and the thickness, __t__, of the coating has been established experimentally and explained by applying a formalism similar to that used in Auger analysis. The thicknesses under investigation range from that of Auger (∼ 3–4 nm) to a fraction of a micron. The accuracy of thickness determination (±5%) is mainly governed by the statistics when the operating conditions are optimized. The x‐ray profiles and images obtained by incident electron beam scanning allow a rapid evaluation (with two‐ or three‐dimensional representations) of the lateral thickness and compositional changes of the coatings. At the same time, the use of the ‘scatter diagram’ technique improves their quantitative interpretation. The lateral resolution (better than 1 μm) and limitation of the technique are discussed. Both academic and practical examples are used to illustrate its application.
Who reads A new approach in non-destructive characterization and XY profilometry of coatings?
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- J. Cazaux; O. Jbara; X. Thomas
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley; Research Square (ISSN 0142-2421)
- Published
- 1990
- Language
- EN
- Field
- Engineering (Physical Sciences)