About this scholarly article

SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2009 - Beijing, China (Wednesday 17 June 2009)] International Symposium on Photoelectronic Detection and Imaging 2009: Advances in Infrared Imaging and Applications - Optimization of (100)-Si TMAH etching for uncooled infrared detector by Shuai, Y.; Wu, C. G.; Zhang, W. L.; Li, Y. R.; Liu, X. Z.; Zhu, J.; Puschell, Jeffery; Gong, Hai-mei; Cai, Yi; Lu, Jin; Fei, Jin-dong is a scholarly article available to read on EtoBox.

Author

Shuai, Y.; Wu, C. G.; Zhang, W. L.; Li, Y. R.; Liu, X. Z.; Zhu, J.; Puschell, Jeffery; Gong, Hai-mei; Cai, Yi; Lu, Jin; Fei, Jin-dong

Publisher

SPIE

Published

2009

Language

EN