About this scholarly article

2009 3rd IEEE International Symposium on Microwave, Antenna, Propagation and EMC Technologies for Wireless Communications - Dry release of MEMS structures using reactive Ion etching technique by Rahman, Hamood Ur; Ramer, Rodica is a scholarly article available to read on EtoBox.

Author

Rahman, Hamood Ur; Ramer, Rodica

Publisher

IEEE

Published

2009