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About this Engineering article
Ion energy distribution in an ECR plasma chamber by Chen Junfang; Ren Zhaoxing is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chen Junfang; Ren Zhaoxing
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0042-207X)
- Published
- 1999
- Language
- EN
- Field
- Engineering (Physical Sciences)