About this Engineering article
Layer Transfer and Simultaneous Activation of Phosphorus Atoms in Silicon Films by Near-Infrared Semiconductor Diode Laser Irradiation by Kobayashi, Yoshitaka; Sakaike, Kohei; Nakamura, Shogo; Ikeda, Mitsuhisa; Ohta, Akio; Higashi, Seiichiro is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kobayashi, Yoshitaka; Sakaike, Kohei; Nakamura, Shogo; Ikeda, Mitsuhisa; Ohta, Akio; Higashi, Seiichiro
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2012
- Language
- EN
- Field
- Engineering (Physical Sciences)