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About this Engineering article
Direct Bonding Mechanism of ALD-Al2O3Thin Films by E. Beche; F. Fournel; V. Larrey; F. Rieutord; C. Morales; A.-M Charvet; F. Madeira; G. Audoit; J.-M. Fabbri is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- E. Beche; F. Fournel; V. Larrey; F. Rieutord; C. Morales; A.-M Charvet; F. Madeira; G. Audoit; J.-M. Fabbri
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)