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About this Engineering article
Low Temperature Photosensitive Polyimide Based Insulating Layer Formation for Microelectromechanical Systems Applications by Fan, J.; Zhu, T.; Wu, W. J.; Tang, S. H.; Liu, J. Q.; Tu, L. C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Fan, J.; Zhu, T.; Wu, W. J.; Tang, S. H.; Liu, J. Q.; Tu, L. C.
- Publisher
- Springer US; Springer-Verlag; Springer New York LLC; Springer Science and Business Media LLC (ISSN 0361-5235)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)