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About this Materials Science article
Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces by Mattila, P.; Bosund, M.; Jussila, H.; Aierken, A.; Riikonen, J.; Huhtio, T.; Lipsanen, H.; Sopanen, M. is a Materials Science article available to read on EtoBox.
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- Author
- Mattila, P.; Bosund, M.; Jussila, H.; Aierken, A.; Riikonen, J.; Huhtio, T.; Lipsanen, H.; Sopanen, M.
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0169-4332)
- Published
- 2014
- Language
- EN
- Field
- Materials Science (Physical Sciences)