Can I read Experimental analysis of a DC–RF hybrid plasma flow on EtoBox?

Experimental analysis of a DC–RF hybrid plasma flow by Kohtaro Kawajiri; Takehiko Sato; Hideya Nishiyama is a Engineering article available to read on EtoBox.

What is Experimental analysis of a DC–RF hybrid plasma flow about?

A direct current (DC)-RF hybrid plasma flow has a very complex flow structure because of the interaction between a DC plasma jet and a RF-ICP flow. Therefore, flow control of a DC-RF hybrid plasma flow is very important to enhance its characteristics such as temperature, stability and plasma flame length. In this paper, we clarified the linear interaction between the flow condition and plasma characteristics, and then optimized its operating condition. A DC-RF hybrid plasma flow becomes stable and is elongated with decreasing the central gas ratio. It also becomes stable with increasing the swirl gas. Moreover, a large amount of N gas can be injected with the central gas. 2

Who reads Experimental analysis of a DC–RF hybrid plasma flow?

Author

Kohtaro Kawajiri; Takehiko Sato; Hideya Nishiyama

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)

Published

2003

Language

EN

Field

Engineering (Physical Sciences)