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About this Materials Science article
Investigation into layers formed by selective transfer CMP mechanisms with atomic force microscope by Filip Ilie is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Filip Ilie
- Publisher
- Springer Netherlands; Springer-Verlag; Kluwer Academic Publishers; Springer Science and Business Media LLC; Society for Mining, Metallurgy and Exploration Inc. (ISSN 1388-0764)
- Published
- 2011
- Language
- EN
- Field
- Materials Science (Physical Sciences)