About this scholarly article

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Design and development of microstructures for MEMS applications by Chandra, Sudhir; Singh, Janak; Chand, Ami; Motamedi, M. Edward; Herzig, Hans Peter is a scholarly article available to read on EtoBox.

Author

Chandra, Sudhir; Singh, Janak; Chand, Ami; Motamedi, M. Edward; Herzig, Hans Peter

Publisher

SPIE

Published

1997

Language

EN