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Boron-doped Diamond Thin Film Sensor for Detection of Various Semiconductor Manufacturing Gases by T Takada; T Fukunaga; K Hayashi; Y Yokota; T Tachibana; K Miyata; K Kobashi is a Engineering article available to read on EtoBox.

What is Boron-doped Diamond Thin Film Sensor for Detection of Various Semiconductor Manufacturing Gases about?

Gas sensing characteristics of B-doped polycrystalline diamond thin films were examined, especially for detection of various toxic gases used in semiconductor manufacturing process. It was found that after the diamond thin films with 1-6 = 10 18 cm y3 of B-concentration and 3-5 mm of grain size were treated at 600-7008C for 30 min, they became highly sensitive to extremely low Ž . Ž . Ž . Ž . Ž . concentration of toxic gases such as PH 0.1-0.5 ppm , B H 100 ppb , AsH 50 ppb , GeH 0.2 ppm and SiH 5 ppm . q 2000 3 2 6 3 4 4 Elsevier Science S.A. All rights reserved.

Who reads Boron-doped Diamond Thin Film Sensor for Detection of Various Semiconductor Manufacturing Gases?

Author

T Takada; T Fukunaga; K Hayashi; Y Yokota; T Tachibana; K Miyata; K Kobashi

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0924-4247)

Published

2000

Language

EN

Field

Engineering (Physical Sciences)