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This document discusses the design and fabrication of Anti-resonant Reflecting Optical Waveguides (ARROW) using silicon oxynitride layers deposited by PECVD at low temperatures. The study employs computational methods for optimizing waveguide parameters and demonstrates that ARROW waveguides can achieve single-mode propagation with reduced optical losses, making them suitable for integrated optical devices. The fabrication process involves photolithography and reactive ion etching, with results indicating t
- Author
- Hector Baez Medina
- Language
- EN