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About this Engineering article
Stress Anisotropy and Stress Gradient in Magnetron Sputtered Films with Different Deposition Geometries by Zhao, Z. B.; Yalisove, S. M.; Bilello, J. C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Zhao, Z. B.; Yalisove, S. M.; Bilello, J. C.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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