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Formation of passivation and adhesion layers for Cu via nitridation of Cu-Ti in an ammonia ambient by Daniel Adams; T.L. Alford; S.A. Rafalski; M.J. Rack; S.W. Russell; M.J. Kim; J.W. Mayer is a Materials Science article available to read on EtoBox.

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Author
Daniel Adams; T.L. Alford; S.A. Rafalski; M.J. Rack; S.W. Russell; M.J. Kim; J.W. Mayer
Publisher
Elsevier Science; Elsevier ; Elsevier BV (ISSN 0254-0584)
Published
1996
Field
Materials Science (Physical Sciences)

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