Opening book details…
About this Engineering article
A Maximum Likelihood Approach to the Inverse Problem of Scatterometry by Henn, Mark-Alexander; Gross, Hermann; Scholze, Frank; Wurm, Matthias; Elster, Clemens; Bär, Markus is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Henn, Mark-Alexander; Gross, Hermann; Scholze, Frank; Wurm, Matthias; Elster, Clemens; Bär, Markus
- Publisher
- Optical Society of America; The Optical Society; Washington DC: Optical Society of America, 1997- (ISSN 1094-4087)
- Published
- 2012
- Field
- Engineering (Physical Sciences)